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What is EPSROX (Er: Gate Dielectric constant) in BSIM3v3?

Alex Liao
Hi,

I found Er = 3.9 in BSIM4.5 manual and used in calculation of Cox.
But there is no information of Er in BSIM3v3 which is used in .18um technology.

1. Is Er technology-independent which means it holds of the value 3.9 for all technologies?
2. If there is no such parameter, Er, in old version, how do people calculate Cox (Coxp or Coxe)?

Thanks,
  • Andrew Beckett

    bsim4 has "epsrox" which can be specified (and defaults to 3.9). As far as I can tell, older models have this built-in rather than having it as a parameter.  So you should assume 3.9.

    Regards,

    Andrew.

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