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Multi Part Paths with holes

blankman

Hi,

Just a quick one, I am hoping to create a mpp, however with holes in one of the polygons so that it is drawn as a mesh to account for overly wide metal DRC and also DENSITY. Is it possible to implement holes in a mpp subpath while keeping it all as one polygon?

Thanks,

Brian.

  • Andrew Beckett

    Brian,

    No, this can't be done with an MPP. First of all, the main objects (the master path or offset or enclosure paths) are paths not polygons. You have sub rectangles, but these are also only rectangles. Ideally you have a layer which can be used as a "negative" layer to represent the slots/holes, but other than that you'd either need to create the MPP and then chop the holes. or create a fluid PCell to do the same (not exactly trivial). If you have a negative layer, the processing can be done at mask making time or later in the flow.

    Andrew.

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