This search text may be transcribed, used, stored, or accessed by our third-party service providers per our Cookie Policy and Privacy Policy.
hi all,
I am wondering if someone could tell me more about the correct setting of mfgGridResolution and DBUperUU for a technolgy file for a CMOS technology that uses i-line stepper (365nm) which resolution is 0.8.
As the the standard (default) of mfgGridResolution is 0.001 but this seems too fine resolution for 0.8um technology and dbuperuu value of 1000 seems too high.
Thanks