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Custom deep trench capacitor

madhanmo
madhanmo over 11 years ago

Hi,

I am starting out with a project on DRAM memory cells and am using the cadence 45nm tech node. But at this technology, the capacitance from the mimcap and moscaps need a large area. So I was wondering whether there is any way I would be able to add a custom deep trench capacitor to the technology. Please guide me on what I can do at this point to get about 30-50f of capacitance in a small area preferable deep trench since that wouldn't consume so much space on the die. I am thinking of using sentaurus to simulate the capacitance and import the model as spice model into virtuoso. Please tell me whether this can be done. Or is there a simpler way? And could you point me to some application note that uses this or some references about the above?

 

thanks

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  • Andrew Beckett
    Andrew Beckett over 11 years ago

    Given that gpdk045 is a completely fictional process, you can do whatever you like! As for sentaurus, you'd probably be better off asking about this on a Synopsys forum (since it's a Synopsys rather than Cadence tool). If you're talking about device modelling, something like the Semiconductor Devices forum would be a good bet.

    Andrew. 

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  • Andrew Beckett
    Andrew Beckett over 11 years ago

    Given that gpdk045 is a completely fictional process, you can do whatever you like! As for sentaurus, you'd probably be better off asking about this on a Synopsys forum (since it's a Synopsys rather than Cadence tool). If you're talking about device modelling, something like the Semiconductor Devices forum would be a good bet.

    Andrew. 

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