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Design of Inductor in CMOS - Help needed

Pyroblast

Hello guys, how you doing?

I want to design an inductor with the lowest resistance as possible. For that I am willing to use and electromagnetic simulator to assess and test the indutor.

The technology that I am using is from UMC 130nm. The maximum width that the tech accepts without introduction of slots is 10um. From 10um to 25um slots must be added. The maximum width that the tech allows is 25um.

Generally speaking, I would like to know what is the methodology to insert slots in the metal tracks? (if there is any) What we have to take into account?

- When inserting the slots, we must check the DRC rules regularly until the error goes away?

- There is any tool that does that? That inserts the necessary number of slots to comply with the DRC rules?

That said, now:

Supposing that I want to design a metal track of 100um: Can I use a very large width of 100um metal and then add slots until the complies with the DRC rules? (if it is done this way)

Or should I use 4 metal tracks of 25um. After that, connect each of them to each other by several other metal tracks in perpendicular. Then add slots and check with the DRC rules tool?

I am looking forward to hear from you.

Kind regards.

Parents
  • Andrew Beckett

    I can't answer all of the technology options, but one possibility is to either use Create->Shape->Path or Create->Shape->Polygon and on the F3 options form turn on the Enable Metal Slotting checkbox on the form, which enables the Slot Options tab. Another possibility is to add the slotting afterwards using Create->Slot.

    I don't know of any tool that creates the slots as needed until DRC errors go away. Other than maybe a DRC deck that specifically checks for wide metal and generates the slots - but whether this exists will depend on the process/foundry (or whether you've written it yourself).

    In addition, not sure what the impact of slots on the performance of the inductor might be. A common alternative approach to reduce the resistance of the inductor would be to have multiple metal tracks on top of each other, tied with vias.

    Regards,

    Andrew.

Reply
  • Andrew Beckett

    I can't answer all of the technology options, but one possibility is to either use Create->Shape->Path or Create->Shape->Polygon and on the F3 options form turn on the Enable Metal Slotting checkbox on the form, which enables the Slot Options tab. Another possibility is to add the slotting afterwards using Create->Slot.

    I don't know of any tool that creates the slots as needed until DRC errors go away. Other than maybe a DRC deck that specifically checks for wide metal and generates the slots - but whether this exists will depend on the process/foundry (or whether you've written it yourself).

    In addition, not sure what the impact of slots on the performance of the inductor might be. A common alternative approach to reduce the resistance of the inductor would be to have multiple metal tracks on top of each other, tied with vias.

    Regards,

    Andrew.

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