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Design of Inductor in CMOS - Help needed

Pyroblast

Hello guys, how you doing?

I want to design an inductor with the lowest resistance as possible. For that I am willing to use and electromagnetic simulator to assess and test the indutor.

The technology that I am using is from UMC 130nm. The maximum width that the tech accepts without introduction of slots is 10um. From 10um to 25um slots must be added. The maximum width that the tech allows is 25um.

Generally speaking, I would like to know what is the methodology to insert slots in the metal tracks? (if there is any) What we have to take into account?

- When inserting the slots, we must check the DRC rules regularly until the error goes away?

- There is any tool that does that? That inserts the necessary number of slots to comply with the DRC rules?

That said, now:

Supposing that I want to design a metal track of 100um: Can I use a very large width of 100um metal and then add slots until the complies with the DRC rules? (if it is done this way)

Or should I use 4 metal tracks of 25um. After that, connect each of them to each other by several other metal tracks in perpendicular. Then add slots and check with the DRC rules tool?

I am looking forward to hear from you.

Kind regards.

Parents
  • Andrew Beckett

    The create slot is fairly intuitive - and you can always use the Help on it (rather than me fully describing how it works) - playing with it should be a good choice.

    I'm not sure I've ever seen slotted inductors though... so I wouldn't say this (in my experience) is a common strategy for dealing with wide-metal inductors. I may be wrong of course - I've just not seen them.

    Regards,

    Andrew.

Reply
  • Andrew Beckett

    The create slot is fairly intuitive - and you can always use the Help on it (rather than me fully describing how it works) - playing with it should be a good choice.

    I'm not sure I've ever seen slotted inductors though... so I wouldn't say this (in my experience) is a common strategy for dealing with wide-metal inductors. I may be wrong of course - I've just not seen them.

    Regards,

    Andrew.

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