Wish you are well. I am trying to meet the DRC errors of a layout pattern in FDSOI technology. I almost cleaned DRC errors but I faced only two errors about the maximum empty space as follow:
CxCFILL.W.1 ---> (GUARDEDG not GUARDRNG) sized by -1um not over Union (Ma_All, xxING, TGMOL, MXCRITEXCL, LOGOBND) maximum width for run length >= 5um, where x=1-6 and xx=BEOLPCL.
Actually, there is no much empty space in my layout and above error confused me. I know that each technology brings its own particular rules, but, similar errors might have been seen by someone in other nodes. It will be so appreciable if anyone can help me to clean these errors.