Failing to extract parasitics from layout - capgen file is missing

Hi, when trying to launch Quantus (Pegasus) Parasitic Extraction, I'm getting this error (log output):


  Cadence Quantus Extraction - 64-bit Parasitic Extractor - Version
23.1.1-s235 Fri Sep 27 22:34:56 PDT 2024
---------------------------------------------------------------------------------------------------------------
                                  Copyright 2024 Cadence Design Systems,
Inc.



INFO (EXTQRCXLOG-128) : Quantus command line:
 Started at: 2026-Mar-01 14:12:50 (2026-Mar-01 12:12:50 GMT)
 Executable:
/eda/cadence/2024-25/RHELx86/DDIEXPORT_23.33.000/INNOVUS231/tools.lnx86/extraction/bin/64bit/qrc
 Options:     -log_file /home/la_hk/BAF_RAK/LVSrun/svdb/qrc.OpAmp.log -cmd
/home/la_hk/BAF_RAK/LVSrun/svdb/qrc.OpAmp.ccl
 Current working directory: /home/la_hk/BAF_RAK


INFO (EXTQRCXLOG-103) : The Command File Options for the current Quantus run are as follows:

capacitance \
     -decoupling_factor 1.0 \
     -ground_net "VSS"
extract \
     -selection "all" \
     -type "rc_coupled"
extraction_setup \
     -array_vias_spacing "auto" \
     -max_fracture_length infinite \
     -max_fracture_length_unit "MICRONS" \
     -max_via_array_size \
        "auto" \
     -net_name_space "LAYOUT" \
     -split_via_by_unit_area false
filter_coupling_cap \
     -coupling_cap_threshold_absolute 0.01 \
     -coupling_cap_threshold_relative 0.001
filter_res \
     -merge_parallel_res false \
     -min_res 0.001
input_db -type pegasus \
     -design_cell_name "OpAmp layout Layout_solution" \
     -directory_name "/home/la_hk/BAF_RAK/LVSrun/svdb" \
     -format "DFII" \
     -library_definitions_file "/home/la_hk/BAF_RAK/cds.lib" \
     -run_name "OpAmp"
log_file \
     -file_name "/home/la_hk/BAF_RAK/LVSrun/svdb/qrc.OpAmp.log"
mos_diffusion_parameter_extraction \
     -auto_accuracy_downgrade false \
     -res "fast"
output_db -type smart_view \
     -add_bulk_terminal "true" \
     -cdl_out_map_directory \
        "/home/la_hk/BAF_RAK/CDLrun" \
     -device_finger_delimiter "@" \
     -enable_cellview_check true \
     -include_cap_model "false" \
     -include_parasitic_cap_model "false" \
     -include_parasitic_res_model "comment" \
     -include_parasitic_res_width true \
     -include_res_model "false" \
     -output_xy \
        "CANONICAL_CAP" \
        "CANONICAL_RES" \
        "DIODE" \
        "MOS" \
        "BIPOLAR" \
        "GENERIC" \
     -res_component "presistor" \
     -view_name "sv_extracted"
output_setup \
     -directory_name "/home/la_hk/BAF_RAK/LVSrun/svdb" \
     -file_name "/home/la_hk/BAF_RAK/LVSrun/svdb/OpAmp/rcx.sp" \
     -net_name_space "SCHEMATIC" \
     -temporary_directory_name "OpAmp"
process_technology \
     -technology_corner \
        "rcx_worst" \
     -technology_library_file "/home/la_hk/BAF_RAK/gpdk045_v_6_0/pvtech.lib" \
     -technology_name "gpdk045_pvs" \
     -temperature \
        "25.0"

  WARNING (LBMISC-215199): unable to execute '/eda/cadence/2024-25/RHELx86/DDIEXPORT_23.33.000/INNOVUS231/tools.lnx86/extraction/bin/64bit/capgen'
  
  ERROR (RCXSPIC-27150): The following forked command failed. Contact Cadence Customer Support for assistance.
   /eda/cadence/2024-25/RHELx86/DDIEXPORT_23.33.000/INNOVUS231/tools.lnx86/extraction/bin/64bit/capgen
  
  ERROR (LBRCXM-633): Bad return status from RCX script generator. Status 65280
  
  ERROR (LBRCXM-709): *****  Quantus terminated abnormally  *****

Have checked directory /eda/cadence/2024-25/RHELx86/DDIEXPORT_23.33.000/INNOVUS231/tools.lnx86/extraction/bin/64bit/ - capgen file is missing. Could it be some licensing problem or faulty installation (or deleted file) problem?