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Dummy filling in RF sensitive area

SamanMKD
SamanMKD 2 days ago

Hello everyone,

I have a problem with dummy filling. Since my circuit is in the high-frequency range (around 70 GHz), I cannot fill some sensitive parts, including the circuit core, inductor, and Pad space, with dummy fill. As a result, I get PO, OD, and metal density errors in my DRC. 

What should I do in this case? Do you have any suggestions that can help me, since it is my first tape-out?

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