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What is OPC based metal fill ?

NAADHAN

Hi All ,

              Pls explain what is OPC based metal fill.??

 

Thanks & Regards,

NAADHAN

  • Hi ,

    I got some idea on what is meant by OPC metal fill.


    OPC ----> Optical Proximity Correction

    In OPC MetalFill --->the dimensions of each MetalFill is biggerthan normal MetalFill & indeed it doesnt need further OPC correction.

    In Normal Metal fill ----> fill dimensions are comparable to the smallest geometry possible(for the tool) & this needs OPC correction.

    Why we need OPC ?? ---> When the dimensions of the layout are very small, while mask preparations diffraction occurs at the edges/corners which results in rounding of the corners of the mask pattern. So we need a OPC correction for normal metafill.

    This is what i was able to get.... any corrections on this and additional information on this is welcomed...

    Thanks & Regards,

    NAADHAN 

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