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Litho physical analyser is used to reduce variations in 90 nm and below. What exactly is a hotspot in the context of LPA ?

GayathriJ

Hi,

I am currently creating a LPA flow from 28nm. I was reading the user guide of this tool. It primarily detects hotspots.

What are these hotspots ?  Please explain in detail or point me to any material with information. Thanks !

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