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Poly layer density issue in the stream-out

Amel

Hi all, 

 

In order to cope with tsmc 0.18um requirements regarding poly and metal densities, I have used both dummy metals and dummy Poly to compensate the deficiency of my drawn metals and Poly in my design. By doing so, I achieved 0 DRC errors.
When I have exported my design to GDS and sent it to MOSIS  for  fabrication, I was surprised by the fact that the manufacturability review reveals a warning about poly1 density. I am confused since my design has passed the DRC with 0 errors.
So, I am wondering what could be the cause. is it possible that the dummy poly was not exported? Can anyone help me to overcome this problem?
Thanks in advance.
Amel.

 

Parents
  • Quek

    Hi Amel

    Here are a few possible causes of the discrepancies:

    a. The poly fill was not exported together with the design due to bad layer mapping
    => Correct the layer map file and redo stream out

    b. The poly fill was created using the wrong fill type (e.g. type "dummy" instead of type "drawing") and was not recognized by the foundry sign-off drc deck
    => Re-create the fill using the correct fill type and re-export the gds file

    c. You are using a different verification tool from the foundry (e.g. you are using Assura/PVS and tsmc uses another tool)
    => Get detail information from foundry on the density errors which they have encountered

    d. The density rules in your rule deck are coded differently from those in the foundry sign-off rule deck (due to different tools). E.g. your deck does not use windowing but density of each windows are checked in the sign-off rule deck
    => Get detail information from foundry on the density errors which they have encountered

    e. You had run drc and gotten zero drc errors but had forgotten to enable the switch for density check
    => Enable density check and redo drc

    It would be best to first clarify with the foundry on the details of the density error. : )

    Best regards
    Quek

Reply
  • Quek

    Hi Amel

    Here are a few possible causes of the discrepancies:

    a. The poly fill was not exported together with the design due to bad layer mapping
    => Correct the layer map file and redo stream out

    b. The poly fill was created using the wrong fill type (e.g. type "dummy" instead of type "drawing") and was not recognized by the foundry sign-off drc deck
    => Re-create the fill using the correct fill type and re-export the gds file

    c. You are using a different verification tool from the foundry (e.g. you are using Assura/PVS and tsmc uses another tool)
    => Get detail information from foundry on the density errors which they have encountered

    d. The density rules in your rule deck are coded differently from those in the foundry sign-off rule deck (due to different tools). E.g. your deck does not use windowing but density of each windows are checked in the sign-off rule deck
    => Get detail information from foundry on the density errors which they have encountered

    e. You had run drc and gotten zero drc errors but had forgotten to enable the switch for density check
    => Enable density check and redo drc

    It would be best to first clarify with the foundry on the details of the density error. : )

    Best regards
    Quek

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