Poly layer density issue in the stream-out

Hi Amel

Here are a few possible causes of the discrepancies:

a. The poly fill was not exported together with the design due to bad layer mapping
=> Correct the layer map file and redo stream out

b. The poly fill was created using the wrong fill type (e.g. type "dummy" instead of type "drawing") and was not recognized by the foundry sign-off drc deck
=> Re-create the fill using the correct fill type and re-export the gds file

c. You are using a different verification tool from the foundry (e.g. you are using Assura/PVS and tsmc uses another tool)
=> Get detail information from foundry on the density errors which they have encountered

d. The density rules in your rule deck are coded differently from those in the foundry sign-off rule deck (due to different tools). E.g. your deck does not use windowing but density of each windows are checked in the sign-off rule deck
=> Get detail information from foundry on the density errors which they have encountered

e. You had run drc and gotten zero drc errors but had forgotten to enable the switch for density check
=> Enable density check and redo drc

It would be best to first clarify with the foundry on the details of the density error. : )

Best regards
Quek

Hi Amel

The stream layer map file is named as "techlib.layermap" (e.g. tsmc018.layermap) in the technology library. You can check if "Poly1 dummy" is listed as one of the layers to export. Alternatively, you can import the gds file and check if the imported layout contains poly1 dummy shapes.

I think the most important thing right now is to get detail information on the errors which your foundry is reporting. Otherwise you might not be doing the correct troubleshooting. : )

Best regards
Quek

Hi quek,

I have checked the stream out part in the techfile, it does exist.

I have also checked the PIPO.log I got after GDSII stream-out. " Statistics Of Layers" reveals that poly1 dummy was exported as it can be seen bellow:

********************************************************************************

Product   : Virtuoso(R) STREAM Out

Program   : @(#)$CDS: pipo.exe version 5.1.0 06/20/2007 02:43 (cicsun11) $

SubVersion: sub-version 5.10.41_USR5.90.69

Started at: 08-Apr-2012  11:20:42

User Name : chenouf

Host Name : sapphire

Directory : /home/chenouf/BTS_Strs

CADENCE Design Systems, Inc.

********************************************************************************

                        Statistics Of Layers

Cadence    Cadence    Stream   Stream

 Layer     Purpose    Layer   Datatype Rectangles Polygons Paths  Ellipses  Labels   Nodes

-------------------------------------------------------------------------------------------

METAL1     slot       16        2         0        0        396      0        0        0       

PIMP       drawing    7         0         416      4        0        0        0        0       

METAL6     drawing    38        0         3        107      0        0        0        0       

METAL2     slot       18        2         0        0        3468     0        0        0       

METAL2     drawing    18        0         86       0        0        0        0        0       

METAL4     drawing    31        0         1        0        0        0        0        0       

METAL6     slot       38        2         3624     0        0        0        0        0       

METAL5     dummy      33        1         334      0        0        0        0        0       

WELLBODY   drawing    103       0         30       0        0        0        0        0       

METAL4     slot       31        2         0        0        3460     0        0        0       

NIMP       drawing    8         0         421      8        0        0        0        0       

POLY1      dummy      13        1         168      0        0        0        0        0       

IP         drawing    63        63        0        0        0        0        917      0       

VIA56      drawing    39        0         31797    0        0        0        0        0       

CONT       drawing    15        0         18765    0        0        0        0        0       

METAL5     drawing    33        0         30       102      0        0        0        0       

CONT       pin        15        1         76       0        0        0        0        0       

ref        drawing    0         0         0        0        0        0        3        0       

VIA23      drawing    27        0         6615     0        0        0        0        0       

PAD        drawing    19        0         1        0        0        0        0        0       

METAL2     dummy      18        1         346      0        0        0        0        0       

METAL3     dummy      28        1         345      0        0        0        0        0       

LUPWDMY    drawing    255       1         178      0        0        0        0        0       

DIFF       drawing    3         0         1296     272      0        0        0        0       

LOGO       drawing    178       0         314      0        0        0        0        0       

NWELL      drawing    2         0         176      0        0        0        0        0       

METAL3     slot       28        2         0        0        3420     0        0        0       

METAL3     drawing    28        0         1        0        0        0        0        0       

METAL6     dummy      38        1         543      0        0        0        0        0       

METAL1     drawing    16        0         1259     1121     0        0        4        0       

METAL5     slot       33        2         63       0        3440     0        0        0       

VIA34      drawing    29        0         6613     0        0        0        0        0       

VIA12      drawing    17        0         6675     0        0        0        0        0       

VIA45      drawing    32        0         6615     0        0        0        0        0       

POLY1      drawing    13        0         641      265      3        0        0        0       

METAL4     dummy      31        1         346      0        0        0        0        0       

   Summary Of Objects

------------------------

   87778 Rectangles

    1879 Polygons

   14187 Paths

       0 Ellipses

     924 Labels

    1698 Instances

       0 Arrays

     189 Cells

       0 Nodes

00:00:05 Elapsed time

00:00:03 CPU time

   53533 Kbytes of memory

*** There were 0 error and 2 warning messages ***

The setup file's contents :

streamOutKeys = list(nil

'runDir "."

'libName "lib_strs"

'primaryCell "BTS_Structures"

'viewName "layout"

'outFile "/home/chenouf/Desktop/BTS_Structures.gds"

'scale 0.001000

'units "micron"

'compression "none"

'hierDepth 32

'convertToGeo nil

'maxVertices 200

'refLib nil

'libVersion "5.0"

'checkPolygon nil

'snapToGrid nil

'simMosaicToArray t

'caseSensitivity "preserve"

'textCaseSensitivity "preserve"

'lineToZeroPath "path"

'convertDot "ignore"

'rectToBox nil

'convertPathToPoly nil

'keepPcell nil

'replaceBusBitChar nil

'useParentXYforText nil

'reportPrecision nil

'runQuiet nil

'comprehensiveLog nil

'ignorePcellEvalFail nil

'translateTopDown nil

'errFile "/home/chenouf/Desktop/PIPO.LOG"

'NOUnmappingLayerWarning nil

'techFileChoice nil

'pcellSuffix "DbId"

'respectGDSIILimits nil

'dumpPcellInfo nil

'genListHier nil

'cellMapTable ""

'layerTable ""

'textFontTable ""

'convertPin "geometry"

'pinInfo 0

'pinTextMapTable ""

'propMapTable ""

'propSeparator ","

'userSkillFile ""

'rodDir ""

'refLibList ""

)

Hi all,

I sent both my design DRC &  PIPO logfiles (for GDS2 stream-out) to Mosis service 

and it seems that  "Manufacturability Review does not handle Poly or

OD dummy (fill) -- just the metal fill layers. Your OD and Poly dummy

fill _will_ be manufactured; it just isn't being counted in our initial

density measurement.

It is on our list of things to fix, but, until that happens, you'll just have

to ignore the warning(s) if you know that your filled layout is OK."

I am releaved now and the issue is resolved.

Amel.

Hi Amel

Thank you very much for sharing the information. : )

Best regards
Quek