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Poly layer density issue in the stream-out

Amel

Hi all, 

 

In order to cope with tsmc 0.18um requirements regarding poly and metal densities, I have used both dummy metals and dummy Poly to compensate the deficiency of my drawn metals and Poly in my design. By doing so, I achieved 0 DRC errors.
When I have exported my design to GDS and sent it to MOSIS  for  fabrication, I was surprised by the fact that the manufacturability review reveals a warning about poly1 density. I am confused since my design has passed the DRC with 0 errors.
So, I am wondering what could be the cause. is it possible that the dummy poly was not exported? Can anyone help me to overcome this problem?
Thanks in advance.
Amel.

 

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  • Quek

    Hi Amel

    The stream layer map file is named as "techlib.layermap" (e.g. tsmc018.layermap) in the technology library. You can check if "Poly1 dummy" is listed as one of the layers to export. Alternatively, you can import the gds file and check if the imported layout contains poly1 dummy shapes.

    I think the most important thing right now is to get detail information on the errors which your foundry is reporting. Otherwise you might not be doing the correct troubleshooting. : )

    Best regards
    Quek

Reply
  • Quek

    Hi Amel

    The stream layer map file is named as "techlib.layermap" (e.g. tsmc018.layermap) in the technology library. You can check if "Poly1 dummy" is listed as one of the layers to export. Alternatively, you can import the gds file and check if the imported layout contains poly1 dummy shapes.

    I think the most important thing right now is to get detail information on the errors which your foundry is reporting. Otherwise you might not be doing the correct troubleshooting. : )

    Best regards
    Quek

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