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Poly layer density issue in the stream-out

Amel

Hi all, 

 

In order to cope with tsmc 0.18um requirements regarding poly and metal densities, I have used both dummy metals and dummy Poly to compensate the deficiency of my drawn metals and Poly in my design. By doing so, I achieved 0 DRC errors.
When I have exported my design to GDS and sent it to MOSIS  for  fabrication, I was surprised by the fact that the manufacturability review reveals a warning about poly1 density. I am confused since my design has passed the DRC with 0 errors.
So, I am wondering what could be the cause. is it possible that the dummy poly was not exported? Can anyone help me to overcome this problem?
Thanks in advance.
Amel.

 

Parents

  • Hi all,

    I sent both my design DRC &  PIPO logfiles (for GDS2 stream-out) to Mosis service 

    and it seems that  "Manufacturability Review does not handle Poly or

    OD dummy (fill) -- just the metal fill layers. Your OD and Poly dummy

    fill _will_ be manufactured; it just isn't being counted in our initial

    density measurement.

    It is on our list of things to fix, but, until that happens, you'll just have

    to ignore the warning(s) if you know that your filled layout is OK."

    I am releaved now and the issue is resolved.

    Amel.

Reply

  • Hi all,

    I sent both my design DRC &  PIPO logfiles (for GDS2 stream-out) to Mosis service 

    and it seems that  "Manufacturability Review does not handle Poly or

    OD dummy (fill) -- just the metal fill layers. Your OD and Poly dummy

    fill _will_ be manufactured; it just isn't being counted in our initial

    density measurement.

    It is on our list of things to fix, but, until that happens, you'll just have

    to ignore the warning(s) if you know that your filled layout is OK."

    I am releaved now and the issue is resolved.

    Amel.

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