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  3. I am encountering an issue where EMX cannot read or display...

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I am encountering an issue where EMX cannot read or display Metal 8 and Metal 9 layers in the layout view. Metal 6 appears correctly.

SA202511121933
SA202511121933 21 hours ago

I am encountering an issue where EMX cannot read or display Metal 8 and Metal 9 layers in the layout view. Only Metal 6 appears correctly.

Reproduction Steps & Observations:

  • I am attempting to simulate an inductor designed on Metal 8. When generating the EMX view, Metal 8 is missing entirely from the layout (see attached screenshot: With_Metal8.png). 

To isolate the issue, I changed the inductor from Metal 8 to Metal 6. After this change, EMX correctly recognizes and displays Metal 6, and the simulation produces expected results (see attached screenshot: With_Metal6_.png).

I am using following software versions.

  • Tool: EMX (version: 6.2)
  • PDK/Technology: TSMC 65nm
  • Cadence Virtuoso version: IC6.1.8-64b.500.21

This is my first time working with EMX so I have no idea what where I am going wrong.

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  • Andrew Beckett
    Andrew Beckett 15 hours ago

    It appears that you're using the generic65.proc sample proc file that comes with EMX rather than a specific one for TSMC n65.  You need to ensure that you have this proc file for the metal stack that you're using and that you set up the emxconfig.il file to point at it (and the layer map for the technology you're using - usually in the technology library. It appears that the layer numbers and datatype numbers in the generic65.proc broadly match TSMC layer numbers but not exactly (I see M8/metal8 is different for example). Even so, the process information is not going to be accurate if using the generic65 - it won't be the real layer thicknesses and dielectric thicknesses, etc.

    The usual approach is to get the IRCX file from TSMC (which they use to store all their technology data such as layer thicknesses and dielectric information etc), and then request a parser from Cadence (contact your account team or submit a support case by logging in to http://ask.cadence.com and then using the Case menu to submit a case) - this parser can produce a proc file from the IRCX file.

    You're also using an old version of EMX (that's not likely to be the reason though).

    Regards,

    Andrew

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  • Andrew Beckett
    Andrew Beckett 15 hours ago

    It appears that you're using the generic65.proc sample proc file that comes with EMX rather than a specific one for TSMC n65.  You need to ensure that you have this proc file for the metal stack that you're using and that you set up the emxconfig.il file to point at it (and the layer map for the technology you're using - usually in the technology library. It appears that the layer numbers and datatype numbers in the generic65.proc broadly match TSMC layer numbers but not exactly (I see M8/metal8 is different for example). Even so, the process information is not going to be accurate if using the generic65 - it won't be the real layer thicknesses and dielectric thicknesses, etc.

    The usual approach is to get the IRCX file from TSMC (which they use to store all their technology data such as layer thicknesses and dielectric information etc), and then request a parser from Cadence (contact your account team or submit a support case by logging in to http://ask.cadence.com and then using the Case menu to submit a case) - this parser can produce a proc file from the IRCX file.

    You're also using an old version of EMX (that's not likely to be the reason though).

    Regards,

    Andrew

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